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MEMSnet Home: MEMS-Talk: Shadow masking
Shadow masking
1998-06-05
[email protected]
Shadow masking
[email protected]
1998-06-05
Does anyone have experience with shadow masking in RIE.  I have some
limited experience in this area that says it will work for my specific
application.  I am now at a stage where I would like to improve my mask.
Can anyone give me insite on fixturing, mask creation, dimesion
limitations, etc.?

Carl


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