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Gold etching
2005-11-30
Sebastien Allard
2005-12-01
Zhang Peng
2005-12-01
Shay Kaplan
2005-12-01
Michael D Martin
2005-12-02
Sebastien Allard
2005-12-02
Bill Moffat
2005-12-02
Sebastien Allard
2005-12-02
David Nemeth
2005-12-05
Manish Hooda
2005-12-02
BobHendu@aol.com
Gold etching
Zhang Peng
2005-12-01
Dear all,

I met a problem on gold etching.
A 1500A Cr + 500A Au layer was sputtered and then annealed at 400C for
5min. The IK+I2+H2O=40g:5g:400ml solution was used to etch Gold. But the
Gold can not be etched away. The solution with more I2 was also tried, but
still the same result. Could the annealing process cause the diffusion of
the Gold into the Chrome and cause this etching problem? Should you have
any experience or ideas on dealing with this problem, pls give me
suggestions. Thanks a lot!

Best,

ZHANG Peng


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