Hi,
   It is possible to crosslink the PMMA using high energy ion irradiation
with higher fluences/ exposure rate. The exposure area can be large enough
from cm^2 to several inch^2. However I would like to know what is the
purpose of crosslinking the PMMA layers.
Cheers,
Bibhu

>From: Fabio Altomare 
>CC:
>To: General MEMS discussion 
>Date: Fri, 2 Dec 2005 15:00:15 -0500 (EST)
>Reply-to: General MEMS discussion 
>Subject: Re: [mems-talk] Crosslink PMMA

>I was one of the person who asked this question. From what I was told you
>can't crosslink PMMA by using UV. If you find something on the contrary