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MEMSnet Home: MEMS-Talk: Will butanol remove Shipley 1800 Resists?
Will butanol remove Shipley 1800 Resists?
2005-12-12
Brian Fung
Will butanol remove Shipley 1800 Resists?
Brian Fung
2005-12-12
Hi all,

Does anybody know if butanol will remove Shipley 1800 Resists?
My inclination tells me that most organic solvents will do it.

I am actually trying to spin SOG on top of patterned resist but
unfortunately the SOG I have now uses acetone as a solvent. I have found
some SOG that only uses butanol. Any suggestions?

Many thanks in advance for your help!

Brian Fung
Photonics Group
Dept. of Electrical and Computer Engineering
University of Toronto
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