> Date:          Thu, 04 Jun 1998 16:45:29 -0400
> From:          "Stephen D. Senturia" 
> Reply-to:      [email protected]
> Subject:       Do you teach a MEMS Course?
> To:            [email protected]
>
 Dear Mr. Senturia

here are the descriptions about our lectures on MEMS.


> I would appreciate your sending me:
> =============
> Title of course

1st) MEMS Technology (lecturer: Michael Sesterhenn)
2nd) MEMS Devices (lecturer: Hermann Sandmaier)

>
> Course number or other catalog identifier
1st)  36374
2nd)  36378

catalog University Stuttgart, Germany
>
> Faculty who teach it (with e-mail)
construction and product engineering

institute: Lehrstuhl fuer Mikrosystemtechnik
(chair of microsytemtechnology)
e-mail: [email protected]

>
> Level (undergrad/grad etc)
1st + 2nd) undergraduated, 7th + 8th semester

>
> A BRIEF subject description (a paragraph, like would
> be listed in a course catalog)

1st)
indroduction to MEMS, cleanroom technology, materials and properties
of materials used in MEMS, PVD, CVD,  spin coating, doping, wet
etching, dry etching, cleaning,  lithography, bulk micromachining,
surface micromachining, LIGA, mechanical microfabrication, mounting
and connecting technics

2nd)
micromechanical buildingblocks: needles, plates, membranes,
beams, springs,  channels, resonators, connectors, coils, movable
structures, filter
microoptical buildingblocks: gratings, adjusting devices,
spectrometer, beam splitter, micro mirrors, beam deflecter,
sensors: pressure sensor, force sensor, distance sensor, acceleration
sensor, gyroscopes, vibration sensors, thermal flow sensors,
temperature sensors
actuators: piezoelectric actuators, interdigitated structures
(linear motor), rotating motors,  pumps, valves, switches

> How often is it offered?
1st)  14 lectures (90 min each) winter term
2nd) 13 lectures (90 min each) summer term

>
> What is your typical enrollment?
1st + 2nd) about 10

> And anything other information you might like to include.
 language of lectures: German

> =============
>

Best regards.


Michael Sesterhenn
--------------------------------

Dipl.-Phys. Michael Sesterhenn

Universität Stuttgart / HSG-IMIT

IMIT:

 Wilhelm-Schickard-Str. 10
 78052 Villingen-Schwenningen
 Tel.: 07721/943-142
 Fax.: 07721/943-210

Uni:

 Breitscheidstr. 2c
 70174 Stuttgart
 Tel.: 0711/121-4180
 Fax.: 0711/121-4181