Hi,
dear members
I am investigating the etching rate of platinum (Pt) in aqua regia. I
use a modified recipe of aqua regia: 8vol.H2O,7vol.HCl,1vol.HNO3 at 85 C
degrees. Does any body have some
informations about this process? I know that the rate should be high,but
'how high'?
Thanks on forehand.
Mounir Ennabli.
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Mounir Ennabli, Transducer group
Mikroelektronik Center
Technical University of Denmark
Room 154, building 345E, 2800 Lyngby
Phone(o): +45 4525 5734
Phone(h): +45 4587 3535-1283
Fax: +45 4588 7762
e-mail: [email protected]
http://www.dtu.dk/mic/
