Dear all,

I would like to know something for cleaning Si-sphere or cylinder.
The size of sphere or cylinder is around 8 cm.
I have to take care about not giving an additional dust, a defect(scratch), or
crack to the Si object.

I have an experience in cleaning some small Si-object in fabrication room.

1. Could you recommend what I have to care about  in chemical(Achol) cleaning of
the big-sized Si objects?

2. Would you recommend the kind of Teflon beaker (PFA/ETFE/PTFE)?
    what is the difference thing between them? How about the possibility of the
scratch in ultrasonic bath?

3. Is there some suitable glove for handling the objects?

Thank you in advance.

Lee