A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: light filter for SU-8 exposure
light filter for SU-8 exposure
2006-01-09
Agung Shamsuddin
light filter for SU-8 exposure
Agung Shamsuddin
2006-01-09
Dear Colleagues,

If heard a lot about filtering out light with wavelength below 350nm when
exposing SU-8 to get best imaging result. Is there any one can tell me what
can of filter I can use or usually use? I am using SU-8 2100 from microchem
and  KarlSuss MJB 3 Mask Aligner as exposing system.

Thank for the inputs.**
--
Agung Shamsuddin S.
Advance Manufacture Lab.
University of Indonesia.
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
MEMStaff Inc.
Harrick Plasma, Inc.
Mentor Graphics Corporation