An alternative to spin coating would be to perform spray coating
instead.  However, before I can recommend this process, I'd need to know
why you wish to avoid spin coating. Depending on the reason, spray coat
may or may not be appropriate.

Best Regards,
Chad Brubaker


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of yilei zhang
Sent: Monday, January 09, 2006 3:00 PM
To: [email protected]
Subject: [mems-talk] evaporation coating photoresist or polymer

Hello colleagues:
Is there any simple way to coat a sample without using spin coating? I
hope
the coating can survive in the following DRIE. I am thinking an
evaporation
way, but was told metal can not be used in DRIE chamber. So is there any
photoresist or polymer is convenient for evaporation coating? Your
suggestions will be highly appreciated.

Regards,
Yilei Zhang