Hi,
I am trying to peel off layers of MICA sheet. Has anybody had any
experience with that ? I want really thin (around a few nm) sheets of
Mica.
Is there a solvent that will help loosen the interlayer bond, is it
possible by any other chemical or physical technique ?
I would really appreciate any help regarding this.
Thanks
unnat.



sokwon Paik wrote:
>
>  I need to etch out Pyrex glass for 1-5 micro meter.
>
>  If the aspect ratio is good then I'll do 5 micro meter and if the
aspect ratio is bad then I'll etch only 1 micro meter or 100nm is
OK.......
>
>  Could anybody tell me your dry etching ratio and wet etching ratio
for Pyrex glass?
>
>  I'll cover the wafer with S1818 which is not intended to etch out. I
wonder whether RIE or wet etching do not attack the S1818 layer
also.....
>