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MEMSnet Home: MEMS-Talk: SU-8 layer less than 1 um
SU-8 layer less than 1 um
2006-01-12
Prem Pal
2006-01-12
Peter Svasek
2006-01-13
walter
2006-01-12
Brubaker Chad
SU-8 layer less than 1 um
Prem Pal
2006-01-12
Dear Researchers
Which SU-8 should I use for depositing a layer of thickness less than 1 um. If
any have done it, please give me the recipe for achieving this thickness by spin
coating.
Thanks in advance

Prem Pal
Yonsei University Seoul

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