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MEMSnet Home: MEMS-Talk: selecting photoresist
selecting photoresist
2006-01-20
Ranjini Menon
selecting photoresist
Ranjini Menon
2006-01-20
Hi all,
I wish to know that how does one select the proper positive
photoresist . I will be using ion beam lithography . For example say
for ion beam of Argon 1+ at 30 KeV , what type of photoresist will be
useful.
Thanks in advance.
Ranjini
reply
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