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MEMSnet Home: MEMS-Talk: Exposure dose in contact lithography
Exposure dose in contact lithography
2006-01-20
Ashish Jagtiani
2006-01-20
Isaac Chan
Exposure dose in contact lithography
Ashish Jagtiani
2006-01-20
Hi

Can anyone tell me how do you determine the exposure dose for a
photo resist and time for exposure (I am using AZ4620) and how are
the dose and time related to the photo resist thickness.

Thanks

Ashish J



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