> we would like to make a Ti/Pt/Au stack as electrode materials. We would like
to use as thin as possible electrodes. The gold should be around 20nm.
> What is the smallest thickness for Ti and Pt we should use?

It all depends on your application, temperatures, and on the substrate
you're depositing this on.

Pt is generally used as a plating base for Au, if you just sputter the
stack you don't need no Pt, and TiW is a better barrier between Au and Si.

Call me if you'd like to discuss details (which may end up in payed support ;-)

cheers
klaus

--
Klaus Beschorner
Metron Technology, European Legends Product Manager
Drosselweg 6,71120 Grafenau,Germany. Tel +49-7033-45683