Dear MEMS community,
Is TMAH compatible with a 1 micron, 2-metal process
CMOS ASIC foundry? Can TMAH be used for wet etching?
Are there any contamination and corrosion issues? If
so, what are the safety/set up requirements? Is there
any other CMOS compatible etchant for Si bulk
anisotropic wet etching? Awaiting your valuable
inputs.

thanks,
Srikoundinya Punnamaraju
SITAR
India.