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MEMSnet Home: MEMS-Talk: AZ50 PR thickness not follow spin speed curve
SU8 fabrication on coverglass
2005-12-27
Jesse D Fowler
2005-12-27
yul.fany@gmail.com
2005-12-29
Zeta Tak For YU
2006-01-02
yul.fany@gmail.com
2006-01-03
Zeta Tak For YU
2006-01-03
yul.fany@gmail.com
Bubbling and burnt phenomena of AZ50 after exposure
2006-01-29
Yu, Zeta (Tak For)
2006-01-31
Yu, Zeta (Tak For)
AZ50 PR thickness not follow spin speed curve
2006-01-31
Yu, Zeta (Tak For)
2006-01-31
sokwon Paik
SU8 fabrication on coverglass 1
2005-12-29
Zeta Tak For YU
2005-12-29
yul.fany@gmail.com
2005-12-28
Dwayne Dunaway
AZ50 PR thickness not follow spin speed curve
Yu, Zeta (Tak For)
2006-01-31
Dear Fellows,

I am using AZ50. I got the data sheet relating film thickness and spin
speed. But the thickness I got is always significantly less than the
suggested values. E.g., 1250 rpm for 40 um (from curve: 55), 1000 rpm
for 50 (lately got 40 often) um (from curve: 65), and 750 rpm for 60 um
(from curve: 85). I got this PR recently and it is just manufactured,
and I use it when the PR warmed up to room temperature. If there is some
advice you can provide me? Thanks,

Happy Lunar Dog Year,
Zeta Tak For Yu

reply
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