Hi
TMAH is the base of 'metal ion free' developers used in CMOS so there are no
contaminating issues.
shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Sri Punnamaraju
Sent: Tuesday, January 31, 2006 8:11 AM
To: [email protected]
Subject: [mems-talk] TMAH CMOS compatibility

Dear MEMS community,
Is TMAH compatible with a 1 micron, 2-metal process CMOS ASIC foundry? Can
TMAH be used for wet etching?
Are there any contamination and corrosion issues? If so, what are the
safety/set up requirements? Is there any other CMOS compatible etchant for
Si bulk anisotropic wet etching? Awaiting your valuable inputs.