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MEMSnet Home: MEMS-Talk: TMAH-bathes
TMAH-bathes
1998-06-18
Mattias Vangbo
TMAH-bathes
Mattias Vangbo
1998-06-18
Hello,

is there anyone out there etching using TMAH in a pump circulated bath? We have
the experience that TMAH gels(?) after some time and usage and thereby clogs and
breaks the pump. We wonder if others have the same experience and how they deal
with it.

Best Regards
Mattias


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