Rakesh

  What type of nitride (SiN or TiN or TaN or AlN etc) do you want to deposit on
Al or Cr layers?

Rakesh Poddar  wrote:
  Hi,

I want to electrically insulate my metal patterns (Al, Cr) by depositing a
nitride layer...Is it possible to deposit LPCVD or PECVD nitride on the metal
layer particuarly Al and Cr.. If anybody has prior experience on this kind of
process, please comment...