Kamlesh
Please check if BCB ( benzocyclobutene) from Dow chemicals, specifically
Cyclobutene 3000 can fit your process requirements.
http://bifano.bu.edu/tgbifano/Web/BMC_Mirror_Files/16_CMOS_Chip_JMM.pdf

Sumant Sood
Belford Research Inc.

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Kamesh
Sent: Wednesday, February 08, 2006 4:44 PM
To: [email protected]
Subject: [mems-talk] Wafer Planarization

HI,

I have a wafer with trenches that are 3 um deep and 20 um wide.  I want to
planarize the wafer using a CMOS compatible material while not exceeding a
temperature of 650C.

I presume I cannot use BPSG for this purpose since it reflows only at 950C.I
could use Polyimide but I am not sure if it is CMOS compatible.

Can anyone please suggest an alternative that suits the above requirements.