Chao,

have a look at the following paper:

Ankur O. Aggarwal et al.:
MEMS Composite Structures for Tunable Capacitors and IC-Package Nano
Interconnects.
2004 Electronic Components and Technology Conference, IEEE, pp. 835-842

They report roughening by means of permanganate etch and oxygen plasma.

Dirk


chao@cae.wisc.edu schrieb:

>Hi,
>
>Does anybody know how to roughen SU-8 (crosslinked) surface by either dry etch
>or wet etch? I want to improve the adhesion between metal and su-8 in the
>following plating procedure.