Hi,

I tried to etch cured SU-8 with oxygen plasma and got a rough surface of
the SU.8.
Parameters are:
Plasma etcher STS 320 PC
50 sccm Oxygen
200 mTorr
250 W
The etching rate was 400 nm/min.
With reduced power (100 W)  the rate was 130 nm/min and I got reduced
surface roughness..

Hope this helps, best regards
Peter



chao@cae.wisc.edu wrote:

>Hi,
>
>Does anybody know how to roughen SU-8 (crosslinked) surface by either dry etch
>or wet etch? I want to improve the adhesion between metal and su-8 in the
>following plating procedure.