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MEMSnet Home: MEMS-Talk: RIE etch selectivity between ZEP520: SiO2 and SiO2:GaAs?
RIE etch selectivity between ZEP520: SiO2 and SiO2:GaAs?
2006-02-17
weidong zhou
RIE etch selectivity between ZEP520: SiO2 and SiO2:GaAs?
weidong zhou
2006-02-17
Anyone knows the following RIE etch selectivities:

ZEP520:SiO2
ZEP520:SiNx
SiO2:GaAs
SiNx:GaAs

Thanks for your help.

Weidong
reply
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