Hi everybody
I'm going to do some process with SiC wafers. The problem is the machine
I can use are designed for 4 inch wafers .. and my SiC wafers are 1.3
inch cutted in four !!! For the sputter deposition machine, no problem,
I can use a metal wafer with clips to fix the little wafer. For the
implanter, I can't use that and I must stick the wafer on a 4 inch Si
wafer. The only way I see is to use resist. Do you have other ideas ?
Did somebody use resist as paste ? How did you that ?
Many thanks per advance, Christophe Sudre
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_______________________________________________________________________________
| Dr Christophe Sudre Fax : 353 21 270271
|
| Research Scientist Phone : 353 21 904079
|
| University College Cork WWW :
http://www.nmrc.ucc.ie/|
| National Microelectronics Research Center Email: [email protected]
|
| Lee Maltings, Prospect Row
|
| Cork, Ireland
|
|_______________________________________________________________________________
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