Hi Jing,

You may use perfluorinated chlorosilanes (for example, FDTS or FOTS). The
best results (surface quality, repeatability) are obtainable from the vapor
phase process. Please let me know if you need additional information.

Boris Kobrin, Ph.D.
Director of Technology
Applied Microstructures, Inc.
1020 Rincon Circle, San Jose, CA 95131
(408) 594-0654
[email protected]



Message: 6
Date: Tue, 7 Mar 2006 16:31:31 -0800
From: "Jing Xue" 
Subject: [mems-talk] help for self-assembled hydrophobic monolayer
To: [email protected]
Message-ID:
        <[email protected]>
Content-Type: text/plain; charset=ISO-8859-1

Dear all,

i am looking for some information of the self-assembled hydrophobic
monolayer for metal of Aluminum. Can anyone provide some information
on this, such as the chemical and process for the monolayer?

any advice and suggestions are highly appreciated!

Jing