Thanks so much, Boris!

Could you pls provide more information on this point? Thanks a lot again!

Jing

On 3/8/06, Boris Kobrin  wrote:
> Hi Jing,
>
> You may use perfluorinated chlorosilanes (for example, FDTS or FOTS). The
> best results (surface quality, repeatability) are obtainable from the vapor
> phase process. Please let me know if you need additional information.
>
> Boris Kobrin, Ph.D.
> Director of Technology
> Applied Microstructures, Inc.
> 1020 Rincon Circle, San Jose, CA 95131
> (408) 594-0654
> [email protected]
>
>