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MEMSnet Home: MEMS-Talk: CMP of silicon nitride
CMP of silicon nitride
1998-07-06
Dragoslav M. Mitrinovic
CMP of silicon nitride
Dragoslav M. Mitrinovic
1998-07-06
Dear friends,

I am looking for a place to get done CMP (Chemical Mechanical
Polishing) of a small number (10-20) of 4" silicon wafers covered with
1um film of silicon nitride. I want to remove 50-100nm of silicon
nitride.

I would greatly appreciate your input.

Thanks,
Dragoslav Mitrinovic


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