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MEMSnet Home: MEMS-Talk: Polysilicon
Polysilicon
1998-07-06
Noel A. Heiks
Polysilicon
Noel A. Heiks
1998-07-06
Hello,

Does anyone know of any structural or chemical problems, etc
(other than higher temp) with using dichlorosilane instead
of silane to make poly?  I am concerned with chlorine
incorporation, but suspect it will be driven off at the
higher temperatures.

Thanks for any info you can supply!

Regards,

Noel Heiks, ACT
[email protected]


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