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MEMSnet Home: MEMS-Talk: quartz-quartz bonding
quartz-quartz bonding
2006-03-20
rajiv bharadwaj
2006-03-20
Gareth Jenkins
2006-03-20
Hongjun-ECE
quartz-quartz bonding
rajiv bharadwaj
2006-03-20
All,

What is the optimum bonding temperature for quartz bonds? I have tried 1100
degree C for making microfluidic channels. However, I observe leakage of
current between two closely lying channels over time. I suspect the bonding
between the substrates in failing.

Has anyone had a similar experience? Any suggestions on this matter would be
appreciated.

Thanks,
Rajiv.
reply
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