Dear MEMS society,
Has any of you experience in SFB of a (2µm oxidised) wafer to an SOI wafer
? The silicon on the SOI has to be 2 µm thick. In case you have any
experience in SFB on SOI, could you tell me which difficulties there are to
encounter ? We have some experience with SFB between two "normal" wafers.
Thank you for any help and/ort suggestions !
Wouter

Wouter van der Wijngaart
Kungl. Tekniska Högskolan       Tel:    +46 - (0)8 - 790 66 13
S3, Elektrisk mätteknik Fax:    +46 - (0)8 - 10 08 58
100 44  Stockholm               Minicall:       +46 - (0)740 - 26 71 28
Sweden                  e-mail: [email protected]
http://www.s3.kth.se/instrlab/staff/wouterw.html