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MEMSnet Home: MEMS-Talk: Thin wafer handling
Thin wafer handling
1998-07-14
Babu Narayanan
Thin wafer handling
Babu Narayanan
1998-07-14
We have problem in handling thin wafer,can anyone recomend adhesive to bond
this thin wafer to a dummy wafer and the debonding solution.The bonding
material should with stand atleast 150 deg C(if there is any material which
can withstand 400 deg C then its great), and some mild acids and
solvents.Also the debonding solution should not attack polyimide.
best wishes


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