Hi Arun,
Try some perfluroinated solvents, for example Freon 113 and so on.
Good luck!

Xuemei

-----Ursprüngliche Nachricht-----
Von: Im Auftrag von Arun Kumar
Gesendet: Montag, 27. März 2006 07:42
An: [email protected]
Betreff: [mems-talk] Wet etchant for fluoropolymer

Hi all,

        I have a teflon like plasma deposited fluoropolymer(CF) film on
silicon substrate. I tried to etch the CF alone with acetone. It doesnt have
any etching on CF, is there any other chemical etchant that removes the CF
alone?