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MEMSnet Home: MEMS-Talk: Etching Graphite???
Etching Graphite???
2006-03-28
Jacques Jonsmann
Etching Graphite???
Jacques Jonsmann
2006-03-28
Hi all,

Does anyone know how to etch graphite?
I have plated some nickel microstructures on graphite, and now need to release
etch them. For this I need a graphite etchant with good selectivity to nickel.
I have done all the searches and looked in the books available, but come up with
nothing useful.
Mechanical removal is not possible because the structures are too fragile, and
burning will oxidise the structures too much.

Any good ideas?

Jacques Jonsman

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