There is no need for vapor prime with LOR.  The LOR/resist bilayer
approach, in my experience, is much simpler ard more reliable than image
reversal.

Roger Shile

-----Original Message-----
Ferda,
      Vacuum vapor prime will vacuum dehydrate totally then apply HMDS
while the substrate is dehydrated.  The HMDS can only react with
Hydroxyl ions which are bound tightly to the substrate.  There is no
possibility of poor adhesion. Contact me for details of free test and
test of image reversal for totally controlled lift off.


Bill Moffat, CEO
Yield Engineering Systems, Inc.
2185 Oakland Rd., San Jose, CA  95131
(408) 954-8353