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MEMSnet Home: MEMS-Talk: Growing SiN on copper film using PECVD?
Growing SiN on copper film using PECVD?
2006-04-04
Xiaoding wei
2006-04-19
K A Chan
Cu will be oxidized Re: Growing SiN on copper film using PECVD?
2006-04-23
yuzhul@eden.rutgers.edu
Cu will be oxidized Re: Growing SiN on copper filmusing PECVD?
2006-04-24
Glenn Silveira
2006-04-25
K A Chan
Cu will be oxidized Re: Growing SiN on copper film using PECVD?
2006-04-26
yuzhul@eden.rutgers.edu
Growing SiN on copper film using PECVD?
Xiaoding wei
2006-04-04
Hi,
Does anyone know if I can grow a SiN layer on copper film using PECVD
method?


Thanks
reply
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