Hello,
has anybody experience in exposing SU-8
using a g-line stepper (the only we can use)?
We would need to use thin films (<5µm) of SU-8
for making optical waveguides, but we found
no evidence in publications whether
the absorption would be enough for a
good exposure.
Thanks for your comments.

Regards
Matteo

--
Matteo Dainese
KTH - Royal Institute of Technology
Sweden