SU-8 is virtually transparent to g-line (effectively zero absorption of
wavelengths above 390 nm), and is non-reacting with it.

Best Regards,
Chad Brubaker


-----Original Message-----
From: Matteo Dainese
Sent: Friday, April 07, 2006 7:50 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] G-line for SU-8

Hello,
has anybody experience in exposing SU-8
using a g-line stepper (the only we can use)?
We would need to use thin films (<5µm) of SU-8
for making optical waveguides, but we found
no evidence in publications whether
the absorption would be enough for a
good exposure.
Thanks for your comments.