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MEMSnet Home: MEMS-Talk: How do clean the Cr mask?
G-line for SU-8
2006-04-07
Matteo Dainese
How do clean the Cr mask?
2006-04-07
[email protected]
2006-04-07
Brubaker Chad
How do clean the Cr mask?
[email protected]
2006-04-07
Hello all,


I am using the SU8 right now.
After a while, there are some SU8 residue stuck on the Cr mask.
I am wondering how to clean it?
I am thinking to either spray or immerse using SU8 developer and rinse with IPA?
Would develper or IPA attack Cr?
Or there is better way to clean it?
Thanks for your time.


Jason Huang

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