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MEMSnet Home: MEMS-Talk: Re: How do clean the Cr mask?
Re: How do clean the Cr mask?
2006-04-10
Punarvasu Joshi
Re: How do clean the Cr mask?
Punarvasu Joshi
2006-04-10
  How do clean the Cr mask? ([email protected])

There are couple of ways to clean the mask off of the exposed SU-8
1)You can use the Remover PG, an NMP based solvent from Microchem used to
strip SU8.
2) Another approach is to use any NMP based solvent (for e.g. Microstrip
200, AZ 400T etc). For teh second approach, take the mask and soak it in
acetone for 15-20 min, then soak it into microstrip 2001 or AZ 400T for
15-20min and manually agitate the solution, periodically. The SU-8 will come
off easily.

As for the origin of the problem, make sure that SU-8 is properly and
uniformly baked on a level hotplate or conventonal oven, depending o your
recipe, before exposure.

Joshi
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