A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Si3N4 AFM tips
current leaking of SOI wafer
2006-04-10
cyyfq@bu.edu
2006-04-10
Kenneth Smith
Si3N4 AFM tips
2006-04-10
Nicolas Duarte
Si3N4 AFM tips
Nicolas Duarte
2006-04-10
I was wondering if anyone had a good resource on how silicon nitride
AFM tips are created.  I know the generic process but I need some
specifics for a presentation I will be making and I haven't been able
to find much information.  I guess that most of the details are trade
secrets, but anything that I can reference will be very helpful.
Thanks in advance,

Nik
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
Tanner EDA by Mentor Graphics
Mentor Graphics Corporation
Addison Engineering