Hi,

I'm trying to patter a very thin silver film using photolithography. I am
having a few problems.

1. After developing S1811 in MF 321 (contains TMAH), I cannot seem to etch
silver in HNO3. Does TMAH react with Ag?

Can I just use TMAH to etch silver?

2. Is there a better way to etch silver than using HNO3? I've tried
I2:KI:H2O but I fear that this may be reacting with my PMMA layer which sits
between my silver layer and substrate.

Any advice would be appreciated.

Thanks,

Kevin