Dear all,
   I try to get some material which  can prevent from SF6 dry etching for
at least half an hour. And also it can be coated on the Si substrate or
itself can be as a plate. if you know, could you please introduce it to me?
The time is pressing.

Thank you very much!

Kind regards!

ruiying


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Ruiying Zhang, Electrical & Electronic Engineering,
University of Bristol
Tel:0044-0117-928-8136(O)
[email protected]