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MEMSnet Home: MEMS-Talk: Dry film Processing on SU-8 2002
Dry film Processing on SU-8 2002
2006-04-13
Phaninder kanikella
Dry film Processing on SU-8 2002
Phaninder kanikella
2006-04-13
Hello ,

I am using Dry film MX5000 series from Dupont for lift off process on SU-8
2002 photoresist. I am finding it difficult to remove the dry film after
laminating on SU-8 2002 during the lift off process.

I am using Dynasolve PR 7200 dry film stripper.

Please let me know how to get rid of Dry film on SU-8 2002?

Suggestions would be appreciated.

Thanks.

--
Phaninder Reddy Kanikella
University of Missouri-Rolla
USA.
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