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MEMSnet Home: MEMS-Talk: RE: Best accelarometer?
RE: Best accelarometer?
1995-10-04
WOLLERSHEIM&ltOlaf.Wollersheim@imt.kfk.d400.de
RE: Best accelarometer?
WOLLERSHEIM&ltOlaf.Wollersheim@imt.kfk.d400.de
1995-10-04
Dear Sias,
since I am designing micro-accelerometers in LIGA-technique, I'm very sceptic
about the possibility to have a micromachined accelerometer with 10E-9g
resolution. The reason is the thermal noise of the proof mass, which limits the
resolution of our device to the physical barrier of 4E-6g (ans we have measured
this as a noise density, i.e. noise < 4E-9g/sqrt(Hz) in the range 10..750 Hz).
A new calculation will be necessary for the noise in the case of space
conditions, which doesn't fit with the thermal and pressure range of most
accelerometers. If you think about the special development of a accelerometer
operating under space conditions, please contact me.

Yours,
Olaf Wollersheim
FZK/IMT
Postfach 3640
D-76021 Karlsruhe
Tel. +49 7247 82-3856, Fax -4331
e-mail Wollersheim@IMT.KFK.D400.DE


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