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MEMSnet Home: MEMS-Talk: Silicon Ramp Needed
Silicon Ramp Needed
2006-04-20
garber@engr.uconn.edu
2006-04-20
Richard H. Morrison
2006-04-20
David Nemeth
2006-04-20
William Lanford-Crick
2006-04-20
rogerbr@earthlink.net
2006-04-20
Bill Moffat
2006-04-20
Behraad Bahreyni
2006-04-20
Beggans Michael H IHMD
Silicon Ramp Needed
garber@engr.uconn.edu
2006-04-20
OK Mems people, work with me. This is a real question.  How can I make a
silicon ramp 5um tall on one end and 1um on the other, 250um long, 5um
wide?  I'm starting with a 5um layer of Si on a substrate.  The real
question is how to etch/make a smooth, ramp, type structure.  I feel a few
lith steps of 1um 4 times to build "stairs" and then figure a way to smooth
the 1um steps.  Anyone????

Brent
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