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MEMSnet Home: MEMS-Talk: SU-8 & water absorption
SU-8 & water absorption
2006-04-20
Michael Larsson
2006-04-21
sokwon Paik
SU-8 & water absorption
Michael Larsson
2006-04-20
Hi everyone,

Polyimide is a common dielectric material used in micromachined,
planar RF components to reduce coupling between RF signals and lossy
Si substrates. A drawback is the fact that this polymer absorbs water,
causing changes to RF performance with time and environmental
conditions. Does anyone know if the same is true of x-linked SU-8?

Regards,

Michael
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