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MEMSnet Home: MEMS-Talk: Metal contact to PMMA
Metal contact to PMMA
2006-04-20
Basa Peter
2006-04-22
Kevin
Metal contact to PMMA
Basa Peter
2006-04-20
Hi,

I'd like to make metal contact to a PMMA layer (on Si substrate).
Anyone has an idea which is the best method to do that (evaporation,
sputtering, etc.)? I don't want to harm the PMMA layer.

Thanks,
Peter
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