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MEMSnet Home: MEMS-Talk: DUV resist for holographic gratings
DUV resist for holographic gratings
2006-05-04
smcwilliams@photodigm.com
2006-05-05
Bill Moffat
DUV resist for holographic gratings
smcwilliams@photodigm.com
2006-05-04
I am planning on using the 244nm line from a frequency doubled argon laser
and would like to know what DUV photoresist is typically used for
holographic gratings.  Because of existing topography it is desirable to use
resist thickness of about 100 nm or less.

Thanks in advance for your help,

Scott
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