ISI MEMS Electronic Discussion Group members,

 I am working on KOH Si etch-stop process and had read about
a Poly Boron Film(PBF) that diffuses high concentration Boron
on Si substrate. I am wondering if you had used this material
before and is this method effective etch like the conventional implantation
method.
 Thanks in advance.

Best regards,

Regan Nayve
Fuji Xerox, NMD Dept.
e-mail (business): regan.nayve@fujixerox.co.jp