Terry,

you can try etching with concentrated HF (49%) with about 15um of Nickel as
masking layer.

Ravi

Ravi Deverkadra
3004 The Valley, NE
Atlanta, GA 30328
Cell: 601-832-5515

>From: Terry Zhu 
>Reply-To: General MEMS discussion 
>To: [email protected]
>Subject: [mems-talk] Pyrex etching
>Date: Mon, 8 May 2006 16:57:24 -0700 (PDT)
>
>Hi All,
>
>I want to etch Pyrex for up to 70 microns to make some structures.
>Anyone has experiences and can tell me what the enchant and the masking
>materials(films) are the suitable one? Is it possible to get some sort
>of anistropic etching? Thanks.
>
>Terry